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Facilities

Magnetron sputtering system equipped with AES and LEED:

Gamma 1000C is a state-of-the-art sputtering tool, highly-optimised for both performance and versatility of use. It is capable of depositing conducting and insulating layers of materials in sequence or simultaneously - with unmatched film uniformity - and is ideal for users seeking the optimum quality. Featuring a hydrocarbon and particle free vacuum pumping system, a processing chamber with fast-access entry, and a graphical HMI offering both fine manual control and recipe-driven operation, Gamma 1000C is the ideal platform for R&D and pilot production.

sputtering

Performance and hardware specification

Hardware Specification

Chamber 1 (sputter Chamber)

4 off 75mm Target magnetrons for magnetic materials

1500 Lt/sec CTI Cryopump system

2 off 2kW, 800 Volt DC Power supplies for sputtering

1 off 600 watt, 13.56Mhz RF sputter power supply

1 off 300 watt, 13.56Mhz RF sputter power supply for wafer Bias

PlasmaSwitch to distribute power to all magnetrons

Hot Stage for 150 mm wafers and smaller samples to 850 C

Quartz oscillator system for thickness monitoring of thick layers

Ellipsometer system

Vacuum gauging to 5 x 10-9 torr

Chamber 2 ( Sputter chamber Load Lock)

Turbo pumped Load Lock

ATP80 Alcatel Turbo Pump system

Infra red wafer degas system 1000watts

Automatic wafer transport system with adjustable wafer fork system

Vacuum gauging to 5 x 10-9 torr

Isolation UHV capable gate valve

Chamber 3 LEED Auger System

UHV vacuum analysis chamber

Manual wafer transporter from Sputter Chamber to LEED chamber

Turbo pump

Ion pump and controller

Vacuum Gauging

Sample stage for 150mm wafer

Omicron LEED Auger system

Vacuum gauging to 5 x 10-10 torr (hot ion)

Chamber 4 LEED Auger Load Lock (for independent LEED operation)

Turbo pumped Load Lock 150mm OD

ATP80 Alcatel Turbo Pump system

Manual wafer transport system with adjustable wafer fork system

Vacuum gauging to 5 x 10-9 torr

Isolation UHV capable gate valve

Contact person: Magdalena Lidia CIUREA Ph. D.

Common subsystems

GammaSoft HMI SCADA control system

Dry Pumping roughing / backing pump ‘ACP28 Alcatel’

UHP Gas Delivery with 3 x MFC’s

36U System Control Rack

Power controller for heaters

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Set-up for electrical and galvanomagnetic characterizations of semiconductor nanostructured materials:

This set-up is dedicated to the investigations of electrical transport, phototransport, Hall effect and magnetorezistance in semiconductor nanostructured materials and nanostructures (including multilayers).

Acurate measurements are performed:

  • (photo)current – voltage characteristics at different temperatures (10-500K);
  • current – temperature characteristics at different voltages ( -1000  +1000V);
  • spectral dependence of photocurrent
  • Hall voltage – current characteristics at different magnetic fields and different temperatures (4K – 300K);
  • current – voltage characteristics at different magnetic fields and different temperatures (4K - 300K);
electromagnetice

Set up for the investigation of electrical transport, phototransport and trapping phenomena in semiconductor nanostructures:

Set up for the investigation of electrical transport under magnetic fied:

Set up controlled by LabVIEW 8.5.1

Janis cryostat (4K - 350K)

LakeShore temperature controller 331

LakeShore electromagnet EM4-HVA

Lake Shore gaussmeter DSP 475

Vaccum system (Alcatel preliminary vaccum pump and Pffeifer turbo pump)

Set up controlled by LabVIEW 8.5.1                                                     Janis CCS-450 cryostat (10K-500K),

Keithley 6517A electrometer,                                                                 Keithley 2000 multimeter;

Stanford SR 830 double lock-in amplifier,                                              Newport monochromator,

Newport light source (UV-VIS-NIR),                                                     Keithley 8009 resistivity test fixture

Temperature controller 331                                                                    Agilent source E3644A

Agilent source E3631A                                                                          Data acquisition / Switch Unit 34970A

Vacuum system                                                                                     Stanford SR 540 chopper.

(Alcatel preliminary vaccum pump and Pffeifer turbo pump)

Contact person: Magdalena Lidia CIUREA Ph. D.

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Updated: 31 ian 2012 - Ionel Stavarache: stavarache@infim.ro